Fully suspended slot waveguide racetrack resonators
نویسندگان
چکیده
Optical slot waveguides fabricated on the silicon-on-insulator (SOI) platform enables direct light–matter interaction [1]. Its ring resonators are promising for trace-gas sensing [2], microparticle trapping [3], and nano-optomechanical mass and displacement measurements [4]. To date, slot ring/racetrack structures on buried oxide (BOX) have been adopted in the above applications. However, their operation wavelength is limited below 4.0 μm in the mid-infrared (MIR) regime due to the strong absorption of BOX [1].
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